Focused Ion Beam Milled On-chip Resonator Nanostructures for Applications in Rare-Earth-Ion-Doped Al2O3 Active Waveguides

نویسندگان

  • F. Ay
  • M. Pollnau
چکیده

Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers.

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تاریخ انتشار 2010